发明名称 BUMP BONDING METHOD AND EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To stabilize high-accuracy bump bonding. SOLUTION: On a tail 4a of a wire 4 projecting toward the end of a capillary 12a, a metallic ball 4a is formed by electric discharge. Then the metallic ball 4a is pressed against an object 14 by the capillary 12a, and is friction-bonded to the object. When removing trailing wire 4 from the friction-bonded metallic ball to form a bump 22 by pulling back the capillary 12a and a clamper 8, the capillary 12a and the clamper 8 are moved at an appropriate speed so that the tail length of the wire 4 falls within the specified range even when being removed.
申请公布号 JP2001148394(A) 申请公布日期 2001.05.29
申请号 JP19990330513 申请日期 1999.11.19
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KATANO RYOICHIRO;MAE TAKAHARU;IMANISHI MAKOTO;KANAYAMA SHINJI;IKETANI MASAHIKO
分类号 H01L21/60 主分类号 H01L21/60
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