发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent the decline of the driving power of a transistor and the decline of reliability as much as possible. SOLUTION: This device is provided with the transistor provided with a gate insulation film 5 formed on the element area of a semiconductor substrate 2, a gate electrode formed on the gate insulation film and a diffusion layer 9 formed in the element area on both sides of the gate electrode, a side wall insulation film 11 formed at the side of the gate electrode of the transistor, a barrier insulation film 12 formed so as to cover the transistor and the side wall insulation film, and an intermediate film 11 formed between the diffusion layer and the barrier insulation film. The height of the boundary of the intermediate film and the barrier insulation film from the surface of the semiconductor substrate is made higher than the height of the boundary of the gate insulation film and the gate electrode from the surface of the semiconductor substrate.
申请公布号 JP2001148428(A) 申请公布日期 2001.05.29
申请号 JP19990328149 申请日期 1999.11.18
申请人 TOSHIBA MICROELECTRONICS CORP;TOSHIBA CORP 发明人 AIDA AKIRA;SHIRATA RIICHIRO;HAZAMA HIROAKI;SHIMIZU KAZUHIRO;IIZUKA HIROHISA;ARITOME SEIICHI;KOIDO NAOKI;MARUYAMA TORU;ARAI NORIHISA
分类号 G11C16/04;H01L21/8247;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 G11C16/04
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