发明名称 Laser beam machining apparatus
摘要 A laser beam machining apparatus has machining apparatus including a laser oscillator, a stage for moving a workpiece in XY directions, and a central processing unit (CPU) for controlling laser emission of the laser oscillator and movement of the stage. The CPU causes the laser beam machining apparatus to group machining points on the workpiece into a plurality of segments, each segment being a set of machining points aligned parallel to one of the X axis and Y axis, to create a shortest route through the plurality of segments, to drive the stage along the shortest route, and to apply a laser beam on the machining points on the shortest route.
申请公布号 US6239406(B1) 申请公布日期 2001.05.29
申请号 US19990280827 申请日期 1999.03.30
申请人 NEC CORPORATION 发明人 ONOMA YOSHIMI;EDAHIRO MASATO
分类号 B23K26/00;B23K26/08;H01L21/768;(IPC1-7):B23K26/38 主分类号 B23K26/00
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