发明名称 VERTICAL HEATER
摘要 PROBLEM TO BE SOLVED: To quickly cool an internal material to be heated merely by radially cooling while maintaining a vacuum as it is without raising an atmospheric pressure by eliminating a vacuum in a container 1. SOLUTION: The vertical heater comprises a container 1 containing a material to be heat treated and making its outside a substantially ambient temperature, a heater 12 contained in the container 1 to heat the material from its circumference therein, and heat insulating members 7, 10 contained in the container 1 to heat insulate or shut off the material from the exterior. An at least part of the members 7, 10 is movably disposed between the position around the material and a position separate from the position. For example, the partial member 7 is moved vertically of the container 1 so as to open or close the circumference of the container 1.
申请公布号 JP2001148351(A) 申请公布日期 2001.05.29
申请号 JP19990331010 申请日期 1999.11.22
申请人 SUKEGAWA ELECTRIC CO LTD 发明人 WATANABE FUMIO;HAGA SHIGETAKA
分类号 H01L21/22;F27B1/10;F27B5/14;H01L21/205;(IPC1-7):H01L21/22 主分类号 H01L21/22
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