| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspecting apparatus inexpensive and capable of deciding the presence of the fine flaw of an object to be inspected highly accurately. SOLUTION: A surface inspecting apparatus 10 is equipped with a floodlight projection means 11 for irradiating the surface of an object 50 to be inspected with inspection light L and a light receiving means 12 for receiving lights L1, L2 through the object 50. A light transmitting means 20 having an inner peripheral surface as a reflecting surface high in reflectivity and having a light incident port 21 and a light emitting port 22 emitting the lights to the light receiving means 12 is arranged between the object 50 and the light receiving means 12 so as to be fixed to the light receiving means 12. A pair of the surfaces 20a, 20b, which are almost vertical to the relative moving direction A of the object 50 and the light receiving means 12 and opposed to each other, of the inner peripheral surface of the light transmitting means 20 are formed as inclined surfaces separated from each other from the incident port 21 to the emitting port 22.
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