发明名称 METHOD AND APPARATUS FOR SORTING PARTICLE
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for sorting particles which improves resolution to separate dense defective small particles affecting a commercial value in order to improve separation precision and can do separation in a good yield, without sorting diluted small particles having defective places which do not affect the commercial value. SOLUTION: Particles flowing continuously are illuminated with light, the pixel signal of a solid imaging element camera is binary-coded by a threshold value of a prescribed luminance determined to detect a defective part of the first level from the particles, the pixel signal of the solid imaging element camera is binary-coded by a threshold value of prescribed luminance determined to detect a defective part of the second level which is denser than the first level, when a defective pixel signal is detected from the binary-coded pixel signal, on the basis of the binary-coded data of the pixel signal of the solid imaging camera by a threshold value of prescribed luminance determined to detect the outside shape of the particle and a specified defective particle pixel, the pixel at the central position of the defective particle is specified, and a separation signal for acting on the central position of the defective particle corresponding to the pixel of the specified central position is outputted.
申请公布号 JP2001145855(A) 申请公布日期 2001.05.29
申请号 JP20000247798 申请日期 2000.08.17
申请人 SATAKE ENG CO LTD 发明人 SATAKE SATORU;ITO TAKAFUMI;EGI MASAHIRO
分类号 B07C5/342;G01N21/85;G06T1/00;H01L27/148;(IPC1-7):B07C5/342 主分类号 B07C5/342
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