发明名称
摘要 <p>PURPOSE:To provide a cage type boat whose service life is sufficiently long. CONSTITUTION:In a cage type boat provided with a plurality of slits, a hole 15 having a width larger than or equal to 1.8 times the slit width is formed on the end portion of the slit 14. The hole 15 is arranged to be shifted in the longitudinal direction of the slit 14.</p>
申请公布号 JP3171269(B2) 申请公布日期 2001.05.28
申请号 JP19910228474 申请日期 1991.08.15
申请人 发明人
分类号 H01L21/673;H01L21/22;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 H01L21/673
代理机构 代理人
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