SPECTRALLY CORRELATED METHOD FOR INVESTIGATING LAYER- LIKE PLANAR STRUCTURES

摘要

experimental studies of planar layer-like structures such as semiconductor epitaxial ones in solid-state and semiconductor physics. SUBSTANCE: method involves shaping of experimental specimens with planar correlated heterogeneous layers incorporated in layer-like structure being investigated and auxiliary planar heterogeneous layers carrying data on character of shaped planar heterogeneity; investigation of local fragments of planar heterogeneous structure using spectroscopy method including detection of spectral parameters of layers under investigation and auxiliary layers; analysis of correlation between spectral parameters of investigated and auxiliary layers. Method may be found useful for solving various problems in physics and for obtaining quasi- continuous dependences with short step of source parameter variations, great amount of information for static analysis from each experimental specimen. EFFECT: enlarged functional capabilities, enhanced informative capacity at minimal number of experimental specimens. 2 cl