| 摘要 |
<p>An improved exhaust conductance system for a CVD reactor includes two exhaust paths (202 and 203) and a three-way valve (201) controlling flow to the exhaust paths. The valve directs flow through a first exhaust conductance path (202) when reactant gas passes through the reactor (98), and through a second exhaust conductance path (203) after reactant gas has been purged from the chamber (98) and only purging gas is flowing through the reactor (98).</p> |
