| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide laminated piezoelectric actuators, which are easily formed into a one-dimensional actuator array of an integral structure and each optimal in characteristics, and a method of manufacturing the same. SOLUTION: Narrow and deep grooves are provided on the surface of a piezoelectric ceramic board 1 by dicing, the grooves are filled with metal 9 to serve as outer and inner electrodes respectively, and joints between the inner electrodes and outer electrodes are locally cut off by laser-aided etching, by which a structure that functions as a laminated piezoelectric actuator can be obtained.</p> |
