发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress dielectric breakdown of a silicon oxide layer, which is generated with direct application of a surge inputted from an electrode pad to a diffused resistor provided within a silicon layer in a semiconductor element formed on an SOI substrate. SOLUTION: This semiconductor device includes a protective element, which is constituted of PMOS5, NMOS6 and a diffused resistor 7 formed in the silicon region 3 of the SOI substrate 4 and a resistance means connected between the diffused resistor 7 and electrode pad. This resistance means is structured with a plurality of through-holes 13 connected in series to be formed on the insulation layer 8.
申请公布号 JP2001144260(A) 申请公布日期 2001.05.25
申请号 JP19990327835 申请日期 1999.11.18
申请人 OKI MICRO DESIGN CO LTD;OKI ELECTRIC IND CO LTD 发明人 NAGAYA MASAFUMI
分类号 H01L21/768;H01L21/822;H01L23/62;H01L27/02;H01L27/04;H01L29/786;(IPC1-7):H01L27/04 主分类号 H01L21/768
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