发明名称 |
SCANNING ELECTRON MICROSCOPE |
摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope that includes a perpendicular electromagnetic field generator reducing the axial aberration to prevent chromatic aberration during detection of reflected or highly accelerated secondary electrons. SOLUTION: A secondary electron conversion electrode is arranged in the electron trajectory deflected by the perpendicular electromagnetic field generator to deflect the converted secondary electron detected.
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申请公布号 |
JP2001143649(A) |
申请公布日期 |
2001.05.25 |
申请号 |
JP20000318232 |
申请日期 |
2000.10.13 |
申请人 |
HITACHI LTD |
发明人 |
SATO MITSUGI;OSE YOICHI;FUKUHARA SATORU;TODOKORO HIDEO;ESUMI MAKOTO |
分类号 |
H01J37/147;H01J37/244;H01J37/28;(IPC1-7):H01J37/147 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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