| 摘要 |
The present invention relates to a system and a method for microlithographic writing and inspection on photosensitive substrates, and specially printing and inspection of patterns with extremely high precision, such as photomasks for semiconductor device patterns, display panels, integrated optical devices and electronic interconnect structures. More specifically the invention relates to compensation of substrate offset by modifying the position data or the feeding of the same of the deflector, and the use of a direct digital synthesis (DDS) unit for generation of the sweep frequency drive signal. |
| 申请人 |
MICRONIC LASER SYSTEMS AB;SANDSTROEM, TORBJOERN;ODSELIUS, LEIF;EKBERG, PETER;GULLSTRAND, STEFAN;ISRAELSSON, MATTIAS;ANDERSSON, INGVAR |
发明人 |
SANDSTROEM, TORBJOERN;ODSELIUS, LEIF;EKBERG, PETER;GULLSTRAND, STEFAN;ISRAELSSON, MATTIAS;ANDERSSON, INGVAR |
