SPECTROMETRY, ITS DEVICE, TEMPERATURE MEASURING DEVICE, AND FILM PRESSURE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a wide band spectrometry and its device capable of simultaneous measurement over the whole of a measurement band. SOLUTION: This spectrometer is constructed of a plurality of spectrometers 5, 6, 7, 15, 16, 17 with different wavelength ranges, and light transmitting means 9, 50 are formed of a plurality of light transmitting paths 2, 3, 4, 32, 33, 34, 42, 43, 44 matching the wavelength ranges of the spectrometers 5, 6, 7, 15, 16, 17.