摘要 |
PROBLEM TO BE SOLVED: To provide an interconnection shielding technology for increasing an anti-noise property of a semiconductor IC including a signal processing circuit which needs a high accuracy, especially, of an analog and digital mixed semiconductor IC. SOLUTION: Between a signal line 1 (for example, an analog signal line), a target of shielding and a signal line 2 (for example, a digital signal line) of a source of the noise, both of which are located in the same layer, a signal line 3 for noise shielding (for example, a power line) is disposed. Above the signal lines 1, 3, another signal line for noise shielding (for example, a power line) is disposed. By forming a contact wall 17 for noise shielding over the entire area to be shielded between the signal line 5 and the signal line 3, a noise interference path existing between the signal line 1 and the signal line 2 can be cut off.
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