ALUMINUM NITRIDE HEATER, AND RESISTIVE PASTE FOR ALUMINUM NITRIDE HEATER

摘要

PROBLEM TO BE SOLVED: To provide an aluminum nitride heater having a resistor adhered rigidly on the aluminum nitride substrate. SOLUTION: In the aluminum nitride heater having a resistor 2 consisted of rare metal and lead oxide on the aluminum nitride substrate 1, there are a number of small holes 3 on the adhesion surface of the aluminum nitride substrate 1 and the resistor 2.