LASER DEVICE, LASER ANNEALING METHOD AND PRODUCING METHOD FOR SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser device and a laser annealing method, with which the crystalline semiconductor film of great crystal particle size can be provided and the running cost is reduced. SOLUTION: The fixed laser of easy maintenance and high durability is used as a laser and further made into linear laser light and throughput is improved so that the production cost is reduced as a whole. Further, by irradiating the front and back of an amorphous semiconductor film with such laser light, the crystalline semiconductor film of great crystal particle size is provided.