发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device, capable of improving withstand voltage in a drain side and suppressing increase in capacitance between gate and source in the source side. SOLUTION: This semiconductor device 10 has a field plate 117a formed by horizontally protruding a gate electrode G by a prescribed length overlapped on a surface protective film 113, resulting in effectively improving withstand voltage and suppressing a gate lag. The gate electrode G, however, is not protruded horizontally on the surface protective film 113 in the source electrode side of the opening, resulting in suppressing on of increase in unnecessary capacitance and obtaining satisfactory high frequency and high output characteristics.
申请公布号 JP2001144106(A) 申请公布日期 2001.05.25
申请号 JP19990321939 申请日期 1999.11.12
申请人 NEC CORP 发明人 ASANO KAZUNORI
分类号 H01L29/812;H01L21/338;(IPC1-7):H01L21/338 主分类号 H01L29/812
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