| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric film, which is high in piezoelectric characteristics and a piezoelectric actuator capable of realizing a larger amount of displacement. SOLUTION: In this piezoelectric film, crystals are preferentially oriented on a 221} plane. The crystals are pseudo-cubic or mixed crystals of two crystalline systems, selected from a pseudo-cubic system, a rhombohedral system, and a tetragonal system. Especially, it is preferable that the crystals be of perovskite structure of ABO3 type, and BTO, PZT, PMN-PT, or PZN-PT is more preferable. The crystals are epitaxially grown on a substrate and oriented on a 221} plane.
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