发明名称 PIPE JOINT STRUCTURE IN CLEAN GAS FEED LINE
摘要 PROBLEM TO BE SOLVED: To provide a pipe joint structure in a clean gas feed line in which a blow process is unnecessary for a long time, and the clean gas can be excellently fed without pollution. SOLUTION: A cylindrical secondary side outlet part 4 provided on a filter 2 and a pipe end of a secondary side pipe part 3 are connected to each other so that the pipe end part 5 is concentrically inserted in the secondary side outlet part 4, and an exhaust space 6 to be communicated with a feed line 1 of the clean gas 7 is formed between circumferential surfaces facing each other of both parts 4 and 5. A small capillary-like exhaust port 8 to allow a part 7a of the clean gas 7 flowing in the feed line 1 to leak from an exhaust space 6 outside the feed line 1 is provided on the secondary side outlet part 4.
申请公布号 JP2001141143(A) 申请公布日期 2001.05.25
申请号 JP19990318980 申请日期 1999.11.10
申请人 TAIYO TOYO SANSO CO LTD;MITSUBISHI ELECTRIC CORP;SHIMADA PHYS & CHEM IND CO LTD 发明人 TADA MASUTA;SUGANO ITARU;OISHI TETSUSHI
分类号 H01L21/304;F16L21/00;(IPC1-7):F16L21/00 主分类号 H01L21/304
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