发明名称 |
PIPE JOINT STRUCTURE IN CLEAN GAS FEED LINE |
摘要 |
PROBLEM TO BE SOLVED: To provide a pipe joint structure in a clean gas feed line in which a blow process is unnecessary for a long time, and the clean gas can be excellently fed without pollution. SOLUTION: A cylindrical secondary side outlet part 4 provided on a filter 2 and a pipe end of a secondary side pipe part 3 are connected to each other so that the pipe end part 5 is concentrically inserted in the secondary side outlet part 4, and an exhaust space 6 to be communicated with a feed line 1 of the clean gas 7 is formed between circumferential surfaces facing each other of both parts 4 and 5. A small capillary-like exhaust port 8 to allow a part 7a of the clean gas 7 flowing in the feed line 1 to leak from an exhaust space 6 outside the feed line 1 is provided on the secondary side outlet part 4.
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申请公布号 |
JP2001141143(A) |
申请公布日期 |
2001.05.25 |
申请号 |
JP19990318980 |
申请日期 |
1999.11.10 |
申请人 |
TAIYO TOYO SANSO CO LTD;MITSUBISHI ELECTRIC CORP;SHIMADA PHYS & CHEM IND CO LTD |
发明人 |
TADA MASUTA;SUGANO ITARU;OISHI TETSUSHI |
分类号 |
H01L21/304;F16L21/00;(IPC1-7):F16L21/00 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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