| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate-positioning apparatus for automatic positioning of a substrate 10 housed in a cassette 1. SOLUTION: A box-type cassette 1 holds substrates 10 between a fixed strut 5 and a movable strut, the inner surface of the strut 5 is a reference plane 8, a mount 21 is disposed tiltably on a base 15 of the substrate-positioning apparatus 11, an air cylinder 25 for tilting the mount 21 is attached to the base 15, and the base 15 has a vibrating means 20. The cassette 1 housing the substrates 10 is mounted on the mount 21. The mount 21 is tilted by the air cylinder 25, the vibrating means 20 is actuated to vibrate, and the substrate 10 in the cassette 1 moves downwardly to abut on the reference plane 8, if its one end face does not make contact with the reference plane 8, thereby positioning the substrate 10, relative to the cassette, then the tilt of the mount is returned, and a robot holds and lifts the substrate obliquely upwardly and takes out the cassette. Thus the substrate will not rub the cassette and will not be damaged. |
