| 摘要 |
<p>PROBLEM TO BE SOLVED: To execute suitable and highly accurate scaling correction processing for the dimensional fluctuation of a body to be pattern formed. SOLUTION: Positioning marks P1, P2, P3 and P4 are provided at four corners of a nearly rectangular base plate 20, and relative coordinates are obtained. The degree of expansion and contraction, and the inclination, in a main scanning direction, of a straight line obtained by connecting marks P1 and P2 and that obtained by connecting the marks P3 and P4 in a main scanning (Y) direction are calculated based on the coordinates of the marks P1, P2, P3 and P4. The degree of expansion and contraction and the inclination of an intermediate scanning line are obtained on an assumption that the degree of expansion and contraction, and the inclination in a subscanning (X) direction are linearly changed, so that the base plate 20 is positioned by an X-table 14 and anθ-table 16. Also, an error due to the rotation of the base plate 20 at the time of correcting the inclination is obtained, so that the position of the base plate 20 is corrected.</p> |
