METHOD AND DEVICE FOR MICROFABRICATION

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for microfabrication capable of realizing accurate microfabrication while performing accurate alignment of <=0.1μm without causing positional deviation between an alignment system and an exposure system. SOLUTION: In the case of performing the microfabrication, evanescent light for alignment generated from the same aperture as an aperture for generating evanescent light for exposure is used, so that the accurate microfabrication is realized while performing the alignment.