发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a highly reliable method of manufacturing semiconductor devices and to provide the semiconductor devices. SOLUTION: In this method of manufacturing semiconductor devices, whose electrode forming surface on which electrodes 2 for connection to the outside is formed, are sealed with resin, a resin layer 3 having the function of sealing the electrode forming surface is formed on a semiconductor wafer 1, on which a plurality of semiconductor devices are formed. After the step of forming the resin layer 3, the rear of the semiconductor wafer 1 is ground mechanically for reducing its thickness. In this way, since the semiconductor wafer 1 is reinforced by the resin layer 3 when its thickness is reduced, a uniform reduction in thickness can be performed and no breakage or damage is produced at peeling of a protective sheet, since the protective sheet which was used previously is no longer necessary. Furthermore, since the semiconductor wafer 1 after reducing of its thickness is reinforced by the resin layer 3, damages due to external force at cutting (division) can be prevented.
申请公布号 JP2001144123(A) 申请公布日期 2001.05.25
申请号 JP20000263469 申请日期 2000.08.31
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HAJI HIROSHI;SAKAMI SEIJI
分类号 H01L23/28;H01L21/301;H01L21/304;H01L21/56;H01L23/12;(IPC1-7):H01L21/56 主分类号 H01L23/28
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