| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect the position of a surface for a shorter time. SOLUTION: The detector comprises optical detection systems 15, 16 for detecting the surface position by light irradiation, a capacitance sensor 26 for detecting the surface position by capacitance, and a memory means 24 for storing information about the surface position detection results obtained by the optical detection systems and the capacitance sensor about a surface to be detected. For detecting the surface position by the capacitance sensor, the capacitance sensor is moved in a perpendicular direction to the surface to be detected, thus locating near the surface to be detected.
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