摘要 |
PROBLEM TO BE SOLVED: To provide a gyroscope by which a device can be miniaturized, whose detecting sensitivity can be enhanced and in which a driving voltage can be reduced or the like. SOLUTION: This gyroscope 1 by this invention is provided with a tuning fork 2 which comprises three legs 9 and a support part 10. The gyroscope is provided with an upper-side glass substrate 7 and a lower-side glass substrate 8 which sandwich the tuning forl 2. The gyroscope is provided with fixed electrodes 4a, 4b, for drive, which face base end eisdes of the respective legs 9 and which are installed on both glass substrates 7, 8. The gyroscope is provided with six moving electrodes 5a, 5b, for detection, which are installed on the surface and the rear surface at tip end parts of the respective legs 9 and which are composed of unevenly worked protruding parts. The gyroscope is provided with six fixed electrodes 6a, 6b, for detection, which face the moving electrodes and which are installed on both glass substrates 7, 8. |