PROBE CARD

摘要

This invention relates to a probe card manufactured by the steps of: attaching an insulator board, which is made of a silicone glass material and has a plurality of fine probes formed through an etching process, to a circuit board; bonding the fine probes to the circuit board with wires to connect circuitally; and circuitally connecting the circuit board to a main circuit board using a pad in which metal threads are implanted finely, thereby improving productivity of the probe card having the fine probes. The insulator board having the fine probes touching a circuit element which is the subject of measurement, the circuit board to which the insulator board is attached and which has a plurality of terminals connected to the probes with the wires in the one-to-one correspondence, the main circuit board connected to an exploring equipment which transfers measurement signal to the circuit element, and the pad placed between the circuit board and the main circuit board are made of insulating material. The numerous metal threads, which are implanted and projected from the lower surface of the circuit board and the upper surface of the main circuit board, connect the circuit boards circuitally.