摘要 |
PROBLEM TO BE SOLVED: To provide a pressure gradient plasma gun that produces stable continuous plasma with a durability. SOLUTION: The pressure gradient plasma gun 1A includes a first intermediate electrode 21 arranged at the front of the cathode part 10, second intermediate electrode 22 arranged at the front of the first intermediate electrode 22, and anti-spatterable members 25 arranged in their central front portions so as to be replaced. |