发明名称 PRESSURE GRADIENT PLASMA GUN
摘要 PROBLEM TO BE SOLVED: To provide a pressure gradient plasma gun that produces stable continuous plasma with a durability. SOLUTION: The pressure gradient plasma gun 1A includes a first intermediate electrode 21 arranged at the front of the cathode part 10, second intermediate electrode 22 arranged at the front of the first intermediate electrode 22, and anti-spatterable members 25 arranged in their central front portions so as to be replaced.
申请公布号 JP2001143895(A) 申请公布日期 2001.05.25
申请号 JP20000063697 申请日期 2000.03.08
申请人 CHUGAI RO CO LTD 发明人 SHINTANI MASANORI;FURUYA EIJI
分类号 H05H1/34;C23C14/32;C23C16/513;H01J27/08 主分类号 H05H1/34
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