| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a mass flow rate sensor constructed of a frame formed of a silicon 2 partially at least, a film held by the frame 6, a metal layer 10 arranged above the frame 6, a heating element formed in the metal layer 10 according to a first structure, and at least a single temperature measuring element formed inside the metal layer 10 according to a second structure. SOLUTION: A moisture-proof layer is arranged above the metal layer. In this way, this mass flow rate sensor is provided with improved film stability in comparison with that of a conventional film.</p> |
