METHOD OF MANUFACTURING FIELD EFFECT OPTICAL MODULATOR AND SEMICONDUCTOR OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an EA modulator realizing high light input resistance with the suppression of the temperature rise of an optical waveguide. SOLUTION: An EA-DFB100 has an EA modulator are 102, a separation area 104 and a DFB area 106. Metallic thin films 182 are formed on both ends of the optical waveguide 120 of the EA modulator area 102. When locally large light absorption occurs near the light input terminal 120a of the optical waveguide 120, the metallic thin film 182 cools the vicinity of the optical input terminal 120a and cools the whole optical waveguide 120. In the EA modulator area 102, the damage due to the temperature rise of the optical waveguide 120 can be prevented by the activity of the metallic thin film 182.