发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device having improved element characteristics. SOLUTION: A gate insulating film bas a double-layer structure comprising a silicon oxide film and silicon nitride film, and a silicon oxide film contacting a semiconductor film is added with a small amount of fluorine for fixing sodium ions, resulting in improved element characteristics.</p>
申请公布号 JP2001144304(A) 申请公布日期 2001.05.25
申请号 JP20000304158 申请日期 2000.10.03
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;MASE AKIRA;HAMAYA TOSHIJI
分类号 G02F1/136;G02F1/1368;H01L29/786;(IPC1-7):H01L29/786 主分类号 G02F1/136
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