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发明名称
SPUTTERING APPARATUS WITH A COIL HAVING OVERLAPPING ENDS
摘要
申请公布号
KR20010041917(A)
申请公布日期
2001.05.25
申请号
KR1020007010224
申请日期
2000.09.16
申请人
发明人
分类号
H01L21/30
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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