| 摘要 |
PROBLEM TO BE SOLVED: To enable the quantitative grasp of the conditions (filter clogging, depositing condition of foreign substances on the cooling water piping) of a cooling water piping system in a device manufacturing apparatus such as semiconductor aligners, etc. SOLUTION: The device manufacturing apparatus having a cooling water piping system for cooling the temperature control air in the apparatus comprises means for measuring at least either the pressure or flow rate of the cooling water in the cooling water piping system in order to detect the condition of the cooling water piping system.
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