SYSTEM AND METHOD FOR REMOVAL OF MATERIAL

摘要

Apparatus and method for removal of material in reactions having limited solubility and diffusion. A flow apparatus is provided for removal of material from a work piece having at least one reaction region containing removable material. The apparatus may include first and second assemblies positionable in spaced-apart relation to form a zone extending between the two assemblies for movement of gaseous material. The first assembly may include a fixture positioned to receive the work piece with the reaction region of the work piece disposed in the zone to allow movement of the gaseous material thereover. A flow assembly is configured to transfer into the zone a gas comprising a condensable material and a reacting species. In a method for chemical processing the thickness of a layer of condensate on a surface is actively controlled and a reactant species is diffused from a gaseous region overlying the surface into the layer. According to an exemplary embodiment a workpiece is placed in an atmosphere comprising a condensable gas and a reacting species and the partial pressure of the condensable gas is controlled to limit the formation of liquid condensation on the surface region.