摘要 |
PROBLEM TO BE SOLVED: To provide a folded spring based on micro electro-mechanical RF switch. SOLUTION: A micro electro-mechanical RF switch 10 is formed on a circuit board 12 by means of a micro platform 20 suspended by a spring suspension 22. The spring suspension has an end attached to an anchor 24, extending over a signal line 18 in the substantially perpendicular direction. The micro platform 20 has a short piece 34 arranged adjacent to a gap 21 in the signal line. An electrical contact post is formed over the signal line to form a capacitor, which applied with a selected voltage is drawn by static electricity toward the bottom electrode 14. This switch shows electrical separation of 35 dB in 20 GHz, functioning up to 50 GHz in DC for insertion loss of 0.5 dB. RF switch is used in an electrical communications including wireless communications. |