| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate-arraying method, substrate-arraying equipment, and small processor which enable stable formation of substrate groups in a short time. SOLUTION: An arraying method for wafers W comprises the step of extracting 26 wafer group W from among one carrier C at equal intervals L, and 26 wafers W among the other carrier C, and the step of inserting each of the 26 wafer group W extracted from among the other carrier C between the 26 wafer group W extracted from among of one carrier group C, thereby forming a wafer group 100 where 52 wafers W are arrayed at equal intervals L/2, that is approximately half the equal intervals L.</p> |
