RADIAL FLOW TURBOMOLECULAR VACUUM PUMP

摘要

A radial flow turbomolecular vacuum pump (50) includes a gas inlet (52), a gas outlet (54), a rotor (56), and a stator (59). The rotor includes a first rotor surface (62) that is positioned in a substantially radial direction. A plurality of blades (64) extends from the first rotor surface (62) in a substantially axial direction. The stator includes a first stator surface that is positioned proximate to the first rotor surface in the substantially radial direction. A first and second plurality of vanes (64, 72) extend from the first stator surface and generally forms an annulus therebetween for receiving the first plurality of blades. A drive shaft (74) is coupled to the rotor and positioned in the substantially axial direction. A motor (76) is coupled to the drive shaft and rotates the rotor relative to the stator. The rotation of the rotor relative to the stator causes gas to be pumped from the gas inlet (52) to the gas outlet (54) in the substantially radial direction.