SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning electron microscope that is adapted to obtain an image removed of image disorder influences due to disturbances by means of simple measures. SOLUTION: A signal from a detector 10 is converted to digital signal in A/D converter 11 and stored at a frame memory 12. The stored image signal is converted into an image signal without electromagnetic sight rotation by an image-rotating device 13 on the basis of the signal from a rotating angle controller 7. An adder 14 adds total N of image signals rotated by the image- rotating device 13, and the added image signals are damped into 1/N gain by a damper 15 and stored to a frame memory 16 for displaying. Therefore, the image signal can be averaged.