| 摘要 |
PROBLEM TO BE SOLVED: To prevent the chemical contamination of optical members without increasing the cost by massively consuming an inert gas. SOLUTION: The aligner comprises an inert gas producing means 11 for taking an inert gas 9 from air 8, and an inert gas feed line 12 for feeding the inert gas from the inert gas producing means to the optical path of an illumination light L1 irradiating a substrate 3.
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