| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope for easily observing the surface of a disk-shaped sample. SOLUTION: The scanning probe microscope consists of an optical signal pickup means 104 for detecting an observation position, a chassis 101 for mounting the pickup means 104, a slight-movement scanning means 102 in the direction of the radius of a disk and in a Z direction being mounted to the chassis 101, a guide rail 105 that freely slide the chassis in one direction, a motor 107 for rotating the disk, a Z rough-movement stage 108 for driving the motor 108 up and down in a height wise direction, a slight-speed rotary means 109 for slightly rotating and driving the rotary shaft of the motor while being mounted to the state 108, a displacement detection means 109 for detecting the displacement of the probe, a feedback circuit 111 for reading a signal from the means 110 and sending a Z-directional drive signal to the scanning means 102, a scanning circuit 112 in the direction of the radius of the disk and in the rotary direction of the disk for generating a scanning signal in the direction of the radius of the disk and in the rotary direction of the disk, and a motor 113. |
