| 摘要 |
PROBLEM TO BE SOLVED: To provide a functional film having an electrode that may be connected with a conductive layer with high reliability and stable quality hardly changing the quality with time and that provide easy automated manufacturing facility and a method of fabricating it at low cost. SOLUTION: Sequentially formed over a substrate 20 are a conductive layer 12 and a low conductive layer 13 having a lower conductivity than the layer 12. The method comprises a step of subjecting the surface of the conductive layer 12 to corona discharge, a step of lowering a vacuum chamber 60 to contact its opening portion 65 with the surface of the low conductive layer 13, a step of evacuating the vacuum chamber 60 by opening the exhaust valve 61 to a prescribed vacuum state, and a step of introducing a sputtering gas into the vacuum chamber 60 by opening a gas inlet valve 63 to sputter an electrode film 14 on the surface of the low conductive layer 13. The electrode film 14 is connected through the low conductive layer 13 to the conductive layer 12. |
