| 摘要 |
PROBLEM TO BE SOLVED: To provide a signal detection device and method that can improve the S/N ratio of a probe signal and can detect the signal with high sensitivity, and is suited for a multi probe. SOLUTION: In the signal detection device and method, an AC voltage peculiar to a multi probe is applied as a carrier, and the carrier is modulated by the change in the conductance of a piezo resistance element and an outputted current signal is detected. In the signal detection device and method, a modulation signal obtained from each probe of the multi probe is synthesized, an offset signal from the synthesized modulation signal is eliminated, a signal where the offset signal has been eliminated from the synthesized modulation signal is demodulated by referring to the carrier being applied to each probe.
|
