摘要 |
PROBLEM TO BE SOLVED: To detect failures such as a disconnection, a short-circuit, a crosstalk or the like of a wiring on an integrated circuit chip fixed in potential in a failure diagnostic technology for integrated circuit. SOLUTION: A disconnection between a part, to which a magnetic field is applied, and a part at which a potential is detected by locally applying a magnetic filed to one end of a wiring 103 on an integrated circuit chip 102 using a magnetic field generating head 101 and by measuring a potential change by the magnetic field at another end of the wiring 103. A short-circuit or a crosstalk of the wiring 103 on the integrated circuit chip 102 are detected by measuring a potential change between the wiring 103, to which a magnetic field, and another wiring 103.
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