发明名称 FAILURE DIAGNOSTIC METHOD AND DEVICE FOR SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To detect failures such as a disconnection, a short-circuit, a crosstalk or the like of a wiring on an integrated circuit chip fixed in potential in a failure diagnostic technology for integrated circuit. SOLUTION: A disconnection between a part, to which a magnetic field is applied, and a part at which a potential is detected by locally applying a magnetic filed to one end of a wiring 103 on an integrated circuit chip 102 using a magnetic field generating head 101 and by measuring a potential change by the magnetic field at another end of the wiring 103. A short-circuit or a crosstalk of the wiring 103 on the integrated circuit chip 102 are detected by measuring a potential change between the wiring 103, to which a magnetic field, and another wiring 103.
申请公布号 JP2001141776(A) 申请公布日期 2001.05.25
申请号 JP19990319760 申请日期 1999.11.10
申请人 NEC CORP 发明人 NONAKA JUNPEI
分类号 G01R31/26;G01R31/02;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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