| 摘要 |
<p>An angular speed senor comprising a tuning fork oscillator made of a single crystal piezoelectric material, e.g. quartz and having an improved sensitivity. The angular speed senor comprises integrated two oscillators (20), (30) bonded directly in the thickness direction in such a way that the crystal axes of the oscillators (20), (30) along which pie 30 electric phenomena in mutually opposite polarities occur are parallel to the direction of the thickness and a tuning fork oscillator (10) having two tuning fork arms (10a), (10b) and a tuning fork base part (10c), wherein sensing electrodes (5), (6), (7), (8) are provided on the inner and outer side faces of both tuning fork arms (10a), (10b), which are provided with driving electrodes (1), (2) for the sensing electrodes (5), (6), (7), (8) in order to cancel the capacitive coupling between the driving side and the sensing side.</p> |
