发明名称 ROLLER CONVEYER, HEATER PACKAGING JIG FOR VERTICAL HEAT TREATMENT METHOD AND VERTICAL HEAT TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To attain thinning and the facilitation of assembly. SOLUTION: On thin bases 28 and 29, a recessed part 46 is formed in the prescribed depth from the upper surface, an opening part 47 for housing the downside of a roller 45 is formed in this recessed part 46, both the terminals of a supporting shaft 49, with which the roller 45 is supported so as to be rotated and flat stable planes 48 are formed on the lower surfaces of both terminals at least, are placed in the recessed part 46, and both the terminals of this supporting shaft 49 are held by a holding plate 50.
申请公布号 JP2001144024(A) 申请公布日期 2001.05.25
申请号 JP19990327097 申请日期 1999.11.17
申请人 TOKYO ELECTRON LTD 发明人 KATO KAZUHIKO
分类号 H01L21/677;B65G13/11;H01L21/22;H01L21/68;(IPC1-7):H01L21/22 主分类号 H01L21/677
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