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经营范围
发明名称
DEPOSITING A MATERIAL OF CONTROLLED, VARIABLE THICKNESS ACROSS A SURFACE FOR PLANARIZATION OF THAT SURFACE
摘要
申请公布号
KR20010042493(A)
申请公布日期
2001.05.25
申请号
KR1020007011118
申请日期
2000.10.06
申请人
发明人
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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