MICRO-STEP ACTUATOR USING LADDER TYPE SUSPENSION MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a micro-step actuator built in a ladder type suspension structure capable of generating a high accuracy positional output theoretically despite an open loop by substituting the electric circuit with a mechanical system. SOLUTION: The micro-step actuator built in a ladder type suspension structure is composed of an attraction drive electrode fed with digital signals, shuttle 1 driven to the left and right by the electrode, a stopper 7 to stop the shuttle displacing, a bit type ladder suspension mechanism to perform mechanical digital-analog conversion in which springs 3 and 2 working on the basis of the shuttle displacement and with their compliances related as C to 2C are connected alternately in ladder form, and a displacement output part 8 positioned at the end of the suspension mechanism.