发明名称 APPARATUS FOR CLEANING DISK-SHAPED WORK
摘要 PROBLEM TO BE SOLVED: To obtain a roller type cleaning apparatus which can clean a plurality of works simultaneously and is excellent in efficiency and productivity. SOLUTION: The works W to be cleaned taken out from the row of the works W arranged longitudinally at regular intervals in a carrier 10 are extracted every plurality of the works and lifted to respective cleaning positions whose heights are different alternately from each other by lifting arms 21a, 21b, and each lifted work W is held between a pair of rotating cleaning rollers 3a, 3b while being pressed to a driving belt 34 by the rotational force of the rollers 3a, 3b, rotated forcibly by the belt 34, and scrubbed in cleaning solution 2 by the rollers 3a, 3b. By repeating a similar process, the works W in the carrier 10 are cleaned.
申请公布号 JP2001137790(A) 申请公布日期 2001.05.22
申请号 JP19990326973 申请日期 1999.11.17
申请人 SPEEDFAM CLEAN SYSTEM KK 发明人 TERUI YOSHINOBU;SATO HIROSHI;MIZUNO NORIAKI
分类号 B08B1/02;B08B1/04;B08B3/04;B08B3/10;G11B23/50;H01L21/00;H01L21/304;(IPC1-7):B08B3/04 主分类号 B08B1/02
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