| 摘要 |
PROBLEM TO BE SOLVED: To establish a working method assuring safe operation and a good efficiency and provided an associate working device for embodying the method. SOLUTION: The working method is to subject a base board to etching by blowing particulates to a base material in a working chamber, whereby the particulates are blown to the base material in the condition that the pressure in the working chamber is kept below half the atmospheric pressure, and the associate working device is composed of the working chamber 1 to subject the base board to etching by blowing particulates to the base material placed previously, a particulate spouting means 10 installed inside the chamber, a particulate supplying means 2 to supply particulates to the spouting means 10, and a pressure adjusting means 4 to put the pressure in the chamber under half the atmospheric pressure.
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