| 摘要 |
PROBLEM TO BE SOLVED: To obtain a photo responsive pressure sensitive adhesive tape exhibiting an excellent initial adhesive property to a semiconductor substrate and a thin film substrate, excellent in resistance to chipping in dicing, storing stability, low in generating refuse due to free from releasing paper or releasing film, considering environment and to provide its manufacturing method. SOLUTION: This photo responsive pressure sensitive adhesive tape comprises a photo responsive pressure sensitive adhesive comprising an acrylic polymer having a photo active functional group, a heat crosslinking agent and a photo polymerization initiator, coated on one surface of a base material having transparency to ultra violet rays and a non-silicone releasing agent coated on the other surface of the base material. The acrylic polymer has a weight average molecular weight of 10×104-200×104, a content of the photo active functional group of 0.01-1.0 milli. equivalent/g and a hydroxyl value of 10-100 mgKOH/g.
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